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Electromechanically damped resonator devices and methods

Robichaud Alexandre, Cicek Paul-Vahé, Deslandes Dominic et Nabki Frederic. Electromechanically damped resonator devices and methods. .

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Résumé

Micro-machined acoustic and ultrasonic transducer (MAUT), particularly piezoelectric MAUT (PMAUT), performance tradeoffs have meant reasonable pixel depth resolution necessitated low quality factor (Q) transducers with power distributed over a large bandwidth yielding modest imaging ranges whilst high-Q transducers providing higher acoustic power output for longer imaging ranges exhibit extended ringing limiting pixel depth information. Accordingly, the inventors have established MAUTs supporting high-Q transducers for long-range high-resolution imaging by integrating electromechanical actuators (dampers) which can be selectively engaged to mechanically damped the MAUT. In several applications PMAUT arrays are required where all transducer elements should have almost identical resonant frequencies. However, prior art fabrication processes have tended to produce PMAUTs with large inter-chip and inter-wafer variances. Prior art methodologies to reduce inter-wafer process variations do not address intra-wafer or inter-chip process variations and accordingly the inventors have established manufacturing methodologies and design solutions to address these for the PMAUT resonant frequency.

Type de document:Brevet
Sujets:Sciences naturelles et génie > Génie
Sciences naturelles et génie > Génie > Génie électrique et génie électronique
Sciences naturelles et génie > Sciences appliquées
Département, module, service et unité de recherche:Départements et modules > Département des sciences appliquées > Module d'ingénierie
Mots-clés:Micro-machined acoustic and ultrasonic transducer, MAUT, PMAUT, performance, patent, damped resonator, invention, brevet, transducteur acoustique et ultrasonore micro-usiné, brevet, résonateur amorti, US20200358420A1, H03H9/09, B06B1/0666, H03H3/0072, H03H9/02338, H03H9/2436
Déposé le:03 nov. 2021 23:14
Dernière modification:03 nov. 2021 23:14
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